We propose and demonstrate a Mach-Zehnder modulator in Z-cut lithium niobate thin film (LNTF) with a vertical electric field structure. d Cross-sectional schematic of the EOM structure, where the arrow profile shows the radio frequency (RF) electric field distribution and the color profile shows the optical cavity mode field distribution, both simulated by the FEM method. Broadband electro-optic frequency comb generation in a lithium niobate microring resonator. Herein, we review the progress in microstructure and domain. The modulators are manufactured upon a commercial x-cut lithium niobate on isolator (LNOI) wafer (NANOLN) with a thin-film LN thickness of 500 nm, which is bonded to a buried silica (SiO 2) layer on a 500-m-thick silicon (Si) substrate. High-speed Femto-Joule per bit silicon-conductive oxide nanocavity modulator. A notable decrease of optical Q is not observed until the gap is reduced to below 2.3m. The 50-m width of the electrode (Fig. High performance thin-film lithium niobate modulator on a silicon The best-known electro-optic Pockels material is probably lithium niobate (LiNbO3, LN), which has been widely used in telecommunication1. Abstract: In this paper, we demonstrate up to 260-GBaud single-wavelength coherent transmission by employing an optical transmitter based on two wide-bandwidth devices: a novel 260-GS/s arbitrary waveform generator with a 10-dB bandwidth of 90-GHz and a thin-film Lithium Niobate I/Q modulator with a 3-dB bandwidth of 110-GHz. The modulator utilizes spiral-shaped optical waveguides on Z-cut lithium niobate and the preeminent electro-optic effect which is applied using top and bottom electrodes. Open Access The fully on-chip design achieves a full-swing extinction ratio of 11.5dB. High modulation efficiency lithium niobate Michelson interferometer modulator. Optica 6, 845853 (2019). c Detailed spectrum (blue) with RF driving signal at 2.0GHz with a power of 16mW. J. Lightwave Technol. Topics: 8b), which, however, might sacrifice the optical Q due to metallic losses. 8b, increasing the thickness, tw, of the wing layer will improve the electro-optic tuning since it enhances the amplitude of the driving electric field inside the LN photonic-crystal cavity. Open Access articles citing this article. Essentially, only the 10-m long point-defect cavity requires electric driving to achieve electro-optic modulation. Thin-film lithium niobate (TFLN) has emerged via recent progress in fabrication [20, 21] as a photonics platform with a unique set of capabilities for high-speed applications [22,23,24].While bulk and diffuse-waveguide LN have long been the workhorses of telecommunication technologies, TFLN waveguides offer nanometer-scale confinement, reducing device size, nonlinear thresholds, and switching . You are using a browser version with limited support for CSS. In 2015 IEEE Compound Semiconductor Integrated Circuit Symposium 14 (2015); https://doi.org/10.1109/CSICS.2015.7314513, Letal, G. et al. In the current EOMs shown above, light is coupled into and out of the EOMs via a same side of the cavity, which is not convenient in practice since a circulator is required to separate the modulated light for the laser input. ADS Thin film lithium niobate electro-optic modulator with terahertz operating bandwidth. Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon. ADS Nature 568, 373377 (2019). Such a configuration reduces the critical requirement of electrode alignment as needed in . Rouvalis, E. Indium phosphide based IQ-modulators for coherent pluggable optical transceivers. 28, 736739 (2016). The elliptical hole has dimensions of hx=270nm and hy=490nm, and a fully etched depth of 300nm. Product Overview. Electro-optic modulation in slotted resonant photonic crystal heterostructures. BER versus OSNR for the three modulation schemes at 70Gbaud. Wolf, S. et al. Velocity matching can be achieved with an oxide thickness of about 4,700nm. We first assess the performance of our high symbol rate transmitter . Photon. Electro-optically (EO) tunable metasurfaces have received considerable attention owing to their capability for dynamic light field control. Anyone you share the following link with will be able to read this content: Sorry, a shareable link is not currently available for this article. 1d) to maximize the in-plane electric field Ez, while preventing potential loss induced by metal absorption, which results in a significant electro-optic tuning efficiency of 1.81GHzV1, simulated by the finite element method (see Methods for simulation details). 8c) due to the decrease of optical mode confinement. For LN, however, the EOMs developed so far1,13,14,15,16,17,18,19,20,21,22,23,24,25,26 generally exhibit significant dimensions, leading to significant power required to drive the EOMs. & Capmany, J. 1f), so as to take the advantage of the largest electro-optic component r33 of LN. In 2015 Optical Fiber Communications Conference and Exhibition 13 (2015); https://doi.org/10.1364/OFC.2015.Th4E.3. CAS Folded Heterogeneous Silicon and Lithium Niobate Mach-Zehnder - MDPI Lu, H. et al. By submitting a comment you agree to abide by our Terms and Community Guidelines. Waveguide-integrated, ultralow-energy GeSi electro-absorption modulators. This work is supported in part by the National Science Foundation (NSF) (ECCS1609549, ECCS-1740296 E2CDA and DMR-1231319) and by Harvard University Office of Technology Development (Physical Sciences and Engineering Accelerator Award). LiNbO. Rev. HR00112090012. Commun. Haffner, C. et al. 4b, the \({\mathrm{{TE}}}_{01}^{0}\) mode exhibits a high loaded optical Q (QL) of 1.34105, which is very close to our numerical simulation, indicating the negligible impact of the electrodes on the optical quality. High-Q photonic resonators and electro-optic coupling using silicon-on-lithium-niobate. 5 implies that the linearity of electro-optic modulation in the devices would reach the intrinsic limit determined by the fundamental Lorentzian shape of the cavity resonance47. Extended Data Fig. Femtofarad optoelectronic integration demonstrating energy-saving signal conversion and nonlinear functions. 1e) to achieve a critical coupling. Express 21, 2700327010 (2013). Article Acousto-optical modulation of thin film lithium niobate waveguide devices. 35, 346396 (2017). @article{Hu2023DynamicallyTS, title={Dynamically tunable single-/dual-band of the graphene absorber with a resonant asymmetric grating based on lithium niobate on insulator}, author={Jinhua Hu and Lili Sun and Lei Li and Xiuhong Liu and Danping Ren and Jijun Zhao}, journal={Optics Communications}, year={2023} } CAS Li, M., Ling, J., He, Y. et al. This is in strong contrast to piezoelectric acoustic modulation which is confined to the vicinity of mechanical resonance frequency45,49,50. Fortier, T. M. et al. Poberaj, G., Hu, H., Sohler, W. & Gnter, P. Lithium niobate on insulator (LNOI) for micro-photonic devices. ADS Tzuang, L. D., Fang, K., Nussenzveig, P., Fan, S. & Lipson, M. Non-reciprocal phase shift induced by an effective magnetic flux for light. Janner, D., Tulli, D., Garca-Granda, M., Belmonte, M. & Pruneri, V. Micro-structured integrated electro-optic LiNbO3 modulators. Express 17, 2250522513 (2009). Nat. Rao, A. Phys. volume11, Articlenumber:4123 (2020) Input Requirements LiNbO 3 Lu, H. et al. e, Group refractive indices for both optical and microwave signals as a function of the buried oxide thickness. This phenomenon is shown more clearly in Fig. We believe this is the first LN EOM ever reported with such combined device characteristics and modulation performance. Karpiski, M., Jachura, M., Wright, L. J. http://eospace.com/pdf/EOSPACEbriefProductInfo2017.pdf, 40GHz or 40Gb/s Lithium Niobate Modulators. Sun, C. et al. 3, 9194 (2009). Increasing the electrical driving power now does not perturb the positions of the resonance dips, but rather changes their relative magnitudes since the magnitudes of the created sidebands depends on the driving amplitude48. Get the most important science stories of the day, free in your inbox. IEEE J. Quantum Electron. The broad modulation bandwidth of these devices would thus enable high-speed electro-optic switching. & Nakano, S. High-speed modulator for next-generation large-capacity coherent optical networks. We used two cascaded travelling wave phase modulators for spatiotemporal modulation and a racetrack resonator as a wavelength filter to suppress the sidebands of the reverse propagating . b, c Electro-optic tuning efficiency and optical quality factor of the device as a function of Gap and tw, simulated by the FEM method. Rev. Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages, Sub-1 Volt and high-bandwidth visible to near-infrared electro-optic modulators, Spectral control of nonclassical light pulses using an integrated thin-film lithium niobate modulator, Single-photon detection and cryogenic reconfigurability in lithium niobate nanophotonic circuits, Femtojoule femtosecond all-optical switching in lithium niobate nanophotonics, Extending the spectrum of fully integrated photonics to submicrometre wavelengths, Ultra-low-power second-order nonlinear optics on a chip, Microstructure and domain engineering of lithium niobate crystal films for integrated photonic applications, Femtofarad optoelectronic integration demonstrating energy-saving signal conversion and nonlinear functions, http://creativecommons.org/licenses/by/4.0/, Controlling single rare earth ion emission in an electro-optical nanocavity, Photonic van der Waals integration from 2D materials to 3D nanomembranes, Hydrothermal growth of KTiOPO4 crystal for electro-optical application, High-performance polarization management devices based on thin-film lithium niobate. Femtojoule electro-optic modulation using a silicon-organic hybrid device. The electrodes are designed to be placed close to the photonic-crystal resonator (Fig. ADS supervised the project. CAS 2, red box) is used primarily for impedance matching to the large metal pad for probe contact, which can be decreased to 3m for a fully on-chip operation36. As an example, a gap of ~1.5m would not only result in an optical Q of ~5000 that helps increase the operation bandwidth to ~45GHz, but also improve the electro-optic tuning efficiency by about 31% to 2.38GHzV1, as highlighted in blue in Fig. Nature Article Appl. Opt. For microwave simulations, the electric-field values are obtained when a voltage of 1V is applied across the two electrodes. Lett. 6, 488503 (2012). Opt. Dylan Renaud, Daniel Rimoli Assumpcao, Marko Loncar, Emma Lomonte, Martin A. Wolff, Francesco Lenzini, Qiushi Guo, Ryoto Sekine, Alireza Marandi, Minh A. Tran, Chong Zhang, Tin Komljenovic, Timothy P. McKenna, Hubert S. Stokowski, Amir H. Safavi-Naeini, Kengo Nozaki, Shinji Matsuo, Masaya Notomi, Nature Communications Microstructure and domain engineering of lithium niobate crystal films & Smith, B. J. Bandwidth manipulation of quantum light by an electro-optic time lens. Aoki, M. et al. Lett. Nevertheless, there still exists a balance between the driving voltage and modulation bandwidth. Loncar is a cofounder of HyperLight Corporation, a startup which was launched to commercialize integrated photonic chips based on certain innovations developed in his lab. The device exhibits a resonance at 1554.47nm, which corresponds to the fundamental TE-like cavity mode \({\mathrm{{TE}}}_{01}^{0}\) (Fig. Nat. 1f). Get the most important science stories of the day, free in your inbox. PubMed Central ADS Google Scholar. Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages. 35, 346396 (2017). The devices were fabricated on a 300-nm-thick x-cut single-crystalline LN thin film bonded on a 3-m silicon dioxide layer sitting on a silicon substrate (from NanoLN). http://www.fujitsu.com/jp/group/foc/en/products/optical-devices/100gln/, Eospace 2017 Advanced Products. and M.L. On the other hand, lithium niobate electro-optic modulators, the workhorse of the optoelectronic industry for decades9, have been challenging to integrate on-chip because of difficulties in microstructuring lithium niobate. Correspondence to Photon. Ghelfi, P. et al. 9, 172194 (2015). Lithium niobate photonic-crystal electro-optic modulator EDFA, erbium-doped fibre amplifier; FPC, fibre-polarization controller; MZM, MachZehnder modulator (commercial); OSA, optical spectrum analyser; VOA, variable optical attenuator. 3, e173 (2014). Publishers note: Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations. IEEE Photonics Technol. and A.S. fabricated the devices. IEEE 94, 952985 (2006). All-plasmonic MachZehnder modulator enabling optical high-speed communication at the microscale. Opt. Liu et al. Nguyen, H. C., Hashimoto, S., Shinkawa, M. & Baba, T. Compact and fast photonic crystal silicon optical modulators. Furthermore, our approach could lead to large-scale ultra-low-loss photonic circuits that are reconfigurable on a picosecond timescale, enabling a wide range of quantum and classical applications5,10,11 including feed-forward photonic quantum computation. Lithium niobate piezo-optomechanical crystals. ADS Lett. Opt. For example, LNOI phase modulators with relatively low Nat. The researchers combined the laser with a 50 gigahertz electro-optic modulator in lithium niobate to build a high-power transmitter. Lithium niobate photonic-crystal electro-optic modulator. Electron. 6b). 1f. b Detailed transmission spectrum of the fundamental TE-like cavity mode \({\mathrm{{TE}}}_{01}^{0}\) at a wavelength of 1554.47nm, with the experimental data shown in blue and the theoretical fitting shown in red. Power efficiency is crucial for the application of electro-optic modulator (EOM), which depends sensitively on the physical size of the device27. The equipment in the highlighted dashed box is used for characterizing the performance of electro-optic modulation. Figure8b, c shows the numerically simulated tuning efficiency and the corresponding optical Q, respectively. The researchers combined the laser with a 50 gigahertz electro-optic modulator in lithium niobate to build a high-power transmitter. Express 19, 75307536 (2011). Such a supercell of metasurface is constructed by two kinds of finite-sized arrays possessing different topological properties via the generalized two-dimensional (2D . Optica 4, 15361537 (2017). Laser Photonics Rev. 1d). By 2026, the global lithium niobate modulator market is estimated to surpass US$36.711 billion by 2026, increasing from US$6.568 billion from 2018. Google Scholar. 314, 317 (2014). Publishers note Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations. B 97, 104105 (2018). New light sheet holography overcomes the depth perception challenge in 3D holograms, First-of-its-kind metalens can focus extreme ultraviolet light, An unprecedented look at biological energy on the sub-cellular level, Harvard John A. Paulson School of Engineering and Applied Sciences. C.W., M.Z., X.C., P.W. Nozaki, K. et al. The gray curves show the created individual sidebands with Lorentzian-shape resonances and the dashed vertical lines indicates their relative frequency positions. Single-chip microprocessor that communicates directly using light. The detector output was recorded either by a microwave network analyzer (Keysight N5235B) for characterizing the modulation bandwidth or by a sampling oscilloscope module (Keysight 54754A) to record the eye diagram of the switching signal. Thorlabs.com - Free-Space Electro-Optic Modulators Although attempts have been made to explore the electro-optic effect in LN photonic crystals40,41,42, the low device quality and poor optoelectronic integration unfortunately limit seriously the operation speed. Electron-plasmon interaction on lithium niobate with gold nanolayer and its field distribution dependent modulation. In the past decade, photonic-crystal EOMs have been developed on various material platforms such as silicon32,33,34, GaAs35, InP36, polymers37,38, ITO39, etc. Reference [18] has recently emerged as a promising approach to realize integrated EO modulators with stronger optical connement and high EO efciencies while occupying a smaller footprint [4], [19]-[22]. Nat. https://doi.org/10.1038/s41586-018-0551-y, Complementary Metal Oxide Semiconductor (CMOS). Topics Here we overcome these limitations and demonstrate monolithically integrated lithium niobate electro-optic modulators that feature a CMOS-compatible drive voltage, support data rates up to 210. (Credit: Second Bay Studios/Harvard SEAS). Lithium niobate photonic-crystal electro-optic modulator, https://doi.org/10.1038/s41467-020-17950-7. PubMed In this contribution, we simulate, design, and experimentally demonstrate an integrated optical isolator based on spatiotemporal modulation in the thin-film lithium niobate on an insulator waveguide platform. Lithium Niobate Electro-Optic Modulators, Fiber-Coupled (1260 nm - Thorlabs Provided by the Springer Nature SharedIt content-sharing initiative. 3, 301313 (2009). High-speed electro-optic modulation underlies many important applications ranging from optical communication1, microwave photonics2, computing3, frequency metrology4 to quantum photonics5. PSI offers ultra-high-speed lithium niobate phase modulators. VOA variable optical attenuator, MZI MachZehnder interferometer, EDFA erbium-doped fiber amplifier, BPF bandpass filter, MNA, microwave network analyzer, PRBS pseudo-random binary sequence source. Monolithic silicon photonic integrated circuits for compact 100+Gb/s coherent optical receivers and transmitters. Gap denotes the spacing between the gold electrode and the LN cavity, and tw denotes the thickness of the waveguide wing layer. Device fabrication is performed at the Harvard University Center for Nanoscale Systems, a member of the National Nanotechnology Coordinated Infrastructure Network, which is supported by the NSF under ECCS award no. The inset of a shows the measured normalized transmission (NT) on a logarithmic scale, revealing an extinction ratio of 30 dB. Figure6d shows an example. High-speed plasmonic modulator in a single metal layer. Full Text electro optic modulator 10.1109/LPT.2021.3056913. Google Scholar. Ultra-high-linearity integrated lithium niobate electro-optic modulators a, Set-up for measuring the modulator electro-optic responses from 35GHz to 100GHz. Lithium Niobate Electro-Optic Modulators, Fiber-Coupled (1260 nm - 1625 nm) Up to 40 GHz Lithium Niobate (LiNbO 3) Modulators Fiber-Coupled, High-Speed Modulation Intensity, Phase, or I/Q X-Cut or Z-Cut Devices LNP6118 40 GHz Phase Modulator with Polarizer, Z-Cut LN81S-FC 10 GHz Intensity Modulator, X-Cut LNLVL-IM-Z The left inset shows the orientation of the LN crystal where the optical axis is along the z direction.
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